Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Chromatic confocal spectral interferometry

Not Accessible

Your library or personal account may give you access

Abstract

Chromatic confocal spectral interferomertry (CCSI) is a novel scheme for topography measurements that combines the techniques of spectral interferometry and chromatic confocal microscopy. This hybrid method allows for white-light interferometric detection with a high NA in a single-shot manner. To the best of our knowledge, CCSI is the first interferometric method that utilizes a confocally filtered and chromatically dispersed focus for detection and simultaneously allows for retrieval of the depth position of reflecting or scattering objects utilizing the phase (modulation frequency) of the interferometric signals acquired. With the chromatically dispersed focus, the depth range of the sensor is decoupled from the NA of the microscope objective.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
Chromatically dispersed interferometry with wavelet analysis

Evangelos Papastathopoulos, Klaus Körner, and Wolfgang Osten
Opt. Lett. 31(5) 589-591 (2006)

Spectral characteristics of chromatic confocal imaging systems

Matthias Hillenbrand, Beate Mitschunas, Florian Brill, Adrian Grewe, and Stefan Sinzinger
Appl. Opt. 53(32) 7634-7642 (2014)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved