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Plasmonic color filter based on a hetero-metal-insulator-metal grating

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Abstract

Plasmonic color filters are expected to be candidates for application to complementary metal–oxide–semiconductor (CMOS) image sensor arrays with reduced pixel size, owing to the subwavelength mode volume of plasmons. Designs of metallic gratings based on the guided-mode resonance effect suffer from the sideband transmission issue due to high-order diffraction. Here, we propose a plasmonic color filter structure based on a hetero-metal-insulator-metal grating. The guided mode, in resonance with the second-order diffraction, is highly attenuated by the forbidden band, such that the sideband transmission can be suppressed. As calculated by using the transfer matrix method and the finite-difference time-domain method, the Al-ZnO-Ag waveguide-based structure presents a color filter characteristic with the peak transmittance greater than 70% and the peak wavelength tunable in the visible light band. It may find application in displays, image sensors, and biomedical imaging technologies.

© 2020 Optical Society of America

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