Abstract

Compact all-pass and add–drop microring resonators ($\mathrm{radius}=10\mathrm{\mu m}$) integrated with grating couplers working at 2 μm wavelength are designed, fabricated, and characterized on a commercial 340-nm-thick-top-silicon silicon-on-insulator platform. They are suitable for high-volume integrated optical circuits at 2 μm wavelength as the fabrication process involved are uncomplicated and complementary metal–oxide–semiconductor (CMOS)-process compatible, thus making them more convenient to be utilized. The performance of the grating couplers, based on four most important parameters, has been simulated and optimized. The simulation and experimental results of grating couplers show the lowest coupling loss of 4.5 dB and 6.5 Db, respectively. By utilizing the grating couplers to couple light in and out from the chip, the designed microring resonators have been tested. The experimental results of microring resonators show that an extinction ratio of 12 dB and a quality factor of 11,200 can be achieved. To the best of our knowledge, this is thus far the smallest microring resonator ever demonstrated at this wavelength.

© 2017 Optical Society of America

Efficient 5.2 µm wavelength fiber-to-chip grating couplers for the Ge-on-Si and Ge-on-SOI mid-infrared waveguide platform

Sanja Radosavljevic, Bart Kuyken, and Gunther Roelkens
Opt. Express 25(16) 19034-19042 (2017)

Efficient and broadband subwavelength grating coupler for 3.7 μm mid-infrared silicon photonics integration

Nan Chen, Bowei Dong, Xianshu Luo, Hong Wang, Navab Singh, Guo-Qiang Lo, and Chengkuo Lee
Opt. Express 26(20) 26242-26256 (2018)

Silicon photonic platforms for mid-infrared applications [Invited]

Ting Hu, Bowei Dong, Xianshu Luo, Tsung-Yang Liow, Junfeng Song, Chengkuo Lee, and Guo-Qiang Lo
Photon. Res. 5(5) 417-430 (2017)

Design of a high-efficiency grating coupler based on a silicon nitride overlay for silicon-on-insulator waveguides

Huai-Yi Chen and Kai-Chun Yang
Appl. Opt. 49(33) 6455-6462 (2010)

Compact double-grating coupler between vertically stacked silicon-on-insulator waveguides

Po Dong and Andrew G. Kirk
Appl. Opt. 44(35) 7540-7547 (2005)