Abstract

A laser reflection differential confocal large-radius measurement (RDCLRM) method is proposed to meet the requirements of high-precision measurement for a large radius of curvature (ROC). The RDCLRM identifies the converging point of the multiply reflected test beam by using the differential confocal focusing technology. It then measures the distance between the positions of the test lens corresponding to these converging points for different reflection times. Therefore, a precise and high-efficiency measurement of a large ROC is achieved with a shorter measurement lightpath. The theoretical analyses and preliminary experimental results indicate that RDCLRM has a relative expanded uncertainty of better than 0.005% ($k=2$).

© 2015 Optical Society of America

Laser reflection differential confocal large-radius measurement for concave surfaces

Yang Xiao, Lirong Qiu, and Weiqian Zhao
Appl. Opt. 57(23) 6693-6698 (2018)

Laser differential confocal radius measurement

Weiqian Zhao, Ruoduan Sun, Lirong Qiu, and Dingguo Sha
Opt. Express 18(3) 2345-2360 (2010)

Radius measurement by laser confocal technology

Jiamiao Yang, Lirong Qiu, Weiqian Zhao, Xin Zhang, and Xu Wang
Appl. Opt. 53(13) 2860-2865 (2014)

Error analysis for a laser differential confocal radius measurement system

Xu Wang, Lirong Qiu, Weiqian Zhao, Yang Xiao, and Zhongyu Wang
Appl. Opt. 54(5) 1078-1084 (2015)

Laser differential confocal ultra-large radius measurement for convex spherical surface

Zhigang Li, Lirong Qiu, Weiqian Zhao, and Shuai Yang
Opt. Express 24(17) 19746-19759 (2016)