Abstract
The vibration-modulated subaperture stitching interferometer acquires the interferogram on the fly dynamically. With its highly improved measurement throughput, we applied the device for high overlapping density subaperture stitching interferometry to acquire hundreds of overlapping subapertures in a single phase stitching measurement. The averaging effect of the high overlapping density stitching interferometer is discussed. In the experiment, the proposed high overlapping density stitching interferometer is also proved to reduce measurement uncertainty and improve measurement quality effectively.
© 2014 Optical Society of America
Full Article | PDF ArticleMore Like This
Po-Chih Lin, Hung-Sheng Chang, Yi-Chun Chen, and Chao-Wen Liang
Appl. Opt. 53(29) H220-H226 (2014)
Yi-Chun Chen, Chao-Wen Liang, Hung-Sheng Chang, and Po-Chih Lin
Opt. Express 26(22) 29123-29133 (2018)
Chao-Wen Liang, Hung-Sheng Chang, Po-Chih Lin, Cheng-Chung Lee, and Yi-Chun Chen
Opt. Express 21(15) 18255-18260 (2013)