Abstract
Grating couplers in sputtered aluminum nitride, a piezoelectric material with low loss in the band, are demonstrated. Gratings and a waveguide micromachined on a silicon wafer with 600 nm minimum feature size were defined in a single lithography step without partial etching. Silicon dioxide () was used for cladding layers. Peak coupling efficiency of and a 1 dB bandwidth of 60 nm have been measured. This demonstration of wire waveguides and wideband grating couplers in a material that also has piezoelectric and elasto-optic properties will enable new functions for integrated photonics and optomechanics.
©2012 Optical Society of America
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