Abstract

We present phase-conjugate holographic lithography with a hologram recorded by a digital micromirror device (DMD) and a telecentric lens. In our lithography system, a phase-conjugate hologram is applied instead of conventional masks or reticles to form patterns. This method has the advantage of increasing focus range, and it is applicable to the formation of patterns on fairly uneven surfaces. The hologram pattern is dynamically generated by the DMD, and its resolution is mainly determined by the demagnification of the telecentric lens. We experimentally demonstrate that our holographic lithographic system has a large focus range, and it is feasible to make a large-area hologram by stitching each pattern generated by the DMD without a falling off in resolution.

© 2011 Optical Society of America

Femtosecond 3D photolithography through a digital micromirror device and a microlens array

Aravind Jakkinapalli, Balaji Baskar, and Sy-Bor Wen
Appl. Opt. 61(16) 4891-4899 (2022)

Fast and pure phase-shifting off-axis holographic microscopy with a digital micromirror device

Alexey Brodoline, Daniel Alexandre, and Michel Gross
Appl. Opt. 61(15) 4296-4302 (2022)

Thin holographic camera with integrated reference distribution

Joonku Hahn, Daniel L. Marks, Kerkil Choi, Sehoon Lim, and David J. Brady
Appl. Opt. 50(24) 4848-4854 (2011)

Coaxial holographic encoding based on pure phase modulation

Wei Jia, Zhongyu Chen, Fung Jacky Wen, Changhe Zhou, Yuk Tak Chow, and Po Sheun Chung
Appl. Opt. 50(34) H10-H15 (2011)

Multichannel holographic recording method for three-dimensional displays

Xianwei Rong, Xiaoyan Yu, and Chengxiang Guan
Appl. Opt. 50(7) B77-B80 (2011)