Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Spatial coherence profilometry on tilted surfaces

Not Accessible

Your library or personal account may give you access

Abstract

The influence of tilted surfaces on the measurement of shape by spatial coherence profilometry is investigated. Based on theoretical analysis and experimental results, the systematic measurement error caused by surface tilt is determined. The systematic measurement error depends not only on the tilt angle but also on the parameters of the experimental setup. The theoretical analysis and the experiments show the similarities and differences between spatial coherence profilometry and white-light inter ferometry. We also suggest the conditions to obtain correct measurements by use of spatial coherence profilometry.

© 2009 Optical Society of America

Full Article  |  PDF Article
More Like This
Longitudinal spatial coherence applied for surface profilometry

Joseph Rosen and Mitsuo Takeda
Appl. Opt. 39(23) 4107-4111 (2000)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (12)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (18)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved