Abstract

A concept for a highly miniaturized spectrometer featuring a two-component design is presented. The first component is a planar chip that integrates an input slit and aberration-correcting diffraction grating with an image sensor and is fabricated using microelectromechanical systems (MEMS) technologies. Due to the fabrication in a simple MEMS batch process the essential elements of the spectrometer are automatically aligned, and a low fabrication cost per device can be achieved. The second component is a spherical mirror, which is the only external part. The optimized grating structure compensates for aberrations within the spectrometer operating range, resulting in a diffraction-limited performance of the spectrometer optics. The prototype of the device has been fabricated and characterized. It takes a volume of $0.5{\mathrm{cm}}^3$ and provides a FWHM spectral resolution of $0.7\mathrm{nm}$ over a $350\mathrm{nm}$ bandwidth from $420\mathrm{nm}$ to $770\mathrm{nm}$ combined with an etendue of $7.4\times {10}^{-5}{\mathrm{mm}}^2\mathrm{sr}$.

© 2008 Optical Society of America

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