Abstract

We propose a method for manufacturing linear variable interference filters for two-dimensional (2D) array detectors, based on the use of correcting masks combining both rotation and translation movements of the masks and substrates. The major advantage of this method is its capability to produce several identical filters in a single run. $20\mathrm{mm}\times 20\mathrm{mm}$ samples were manufactured with a wavelength ratio almost equal to 2 along the thickness gradient direction. In agreement with calculations, the measured uniformity perpendicular to the gradient is about 99.8% along $20\mathrm{mm}$.

© 2008 Optical Society of America

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