Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography

Not Accessible

Your library or personal account may give you access

Abstract

We have developed novel aperiodic multilayers, covered by capping layers resistant to environmental attack, that offer superior performance for extreme ultraviolet lithography. We have designed these coatings using an optimization procedure based on an algorithm able to acquire domain knowledge inside the space of possible solutions. An integrated intensity increase of up to 2.18 times that obtained using standard periodic multilayers has been estimated. The aperiodic structures have minimal absorption in the topmost layers, which makes them especially insensitive to both the choice of capping layer material and any subsequent capping layer degradation due to oxidation or contamination. This property allows for the use of the most resilient capping layer materials available, thereby leading to a significantly improved lifetime. We have produced prototype capped aperiodic coatings and have measured their performance.

© 2008 Optical Society of America

Full Article  |  PDF Article
More Like This
High performance EUV multilayer structures insensitive to capping layer optical parameters

Maria Guglielmina Pelizzo, Michele Suman, Gianni Monaco, Piergiorgio Nicolosi, and David L. Windt
Opt. Express 16(19) 15228-15237 (2008)

Design and performance of capping layers for extreme-ultraviolet multilayer mirrors

Saša Bajt, Henry N. Chapman, Nhan Nguyen, Jennifer Alameda, Jeffrey C. Robinson, Michael Malinowski, Eric Gullikson, Andrew Aquila, Charles Tarrio, and Steven Grantham
Appl. Opt. 42(28) 5750-5758 (2003)

Extreme-ultraviolet-induced oxidation of Mo/Si multilayers

Nicolas Benoit, Sven Schröder, Sergiy Yulin, Torsten Feigl, Angela Duparré, Norbert Kaiser, and Andreas Tünnermann
Appl. Opt. 47(19) 3455-3462 (2008)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved