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Digital holographic microscopy in the deep (193 nm) ultraviolet

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Abstract

We present a system based on digital holography suitable for the investigation of microscopic objects. To increase the resolution of the system a deep (193  nm) UV laser source has been used. A method for compensating aberrations due to the nonperfect optical elements used for the recording has been developed. The system allows the investigation of reflecting and transmitting samples.

© 2007 Optical Society of America

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