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The inherent distortion of a reflective parallel aligned spatial light modulator (SLM) may need compensation not only for the backplane curvature but also for other possible nonuniformities caused by thickness variations of the liquid crystal layer across the aperture. First, we build a global look-up table (LUT) of phase modulation versus the addressed gray level for the whole device aperture. Second, when a lack of spatial uniformity is observed, we define a grid of cells onto the SLM aperture and develop a multipoint calibration. The relative phase variations between neighboring cells for a uniform gray level lead us to build a multi-LUT for improved compensation. Multipoint calibration can be done using either phase-shift interferometry or Fourier diffraction pattern analysis of binary phase gratings. Experimental results show the compensation progress in diffractive optical elements displayed on two SLMs.
© 2007 Optical Society of America
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