Abstract

The focusability of multiple high-order harmonics in the extreme-ultraviolet and soft-x-ray regions is described, together with the design and performance of the ellipsoidal mirror used for this purpose. The mirror focuses intense coherent light in the spectral-region from 25 to $40\text{\hspace{0.17em} nm}$ into a $2.4\mu \text{m}$ spot size with a focused peak intensity of $6\times {10}^{13}\text{\hspace{0.17em} W}/{\text{cm}}^2$. The focal images indicate that a good beam profile is obtained with a near-Gaussian distribution and a beam quality factor ${\mathrm{(M}}^2$ value) as low as 2.4.

© 2006 Optical Society of America

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