Abstract
We have developed plasma chemical vaporization machining by using a microelectrode for the fabrication of small complex-shaped optical surfaces. In this method, a diameter pipe microelectrode, from which processing gas is drawn in, generates a small localized plasma that is scanned over a workpiece under numerical computer control to shape a desired surface. A nonaxisymmetric mirror with a maximum depth of approximately was successfully fabricated with a peak-to-valley shape accuracy of in an area excluding the edges of the mirror. The average surface roughness was , which is smooth enough for optical use.
© 2006 Optical Society of America
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