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Fringe modulation skewing effect in white-light vertical scanning interferometry

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Abstract

An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain the effect.

© 2000 Optical Society of America

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