Abstract

Utilization of second-, third-, and fourth-order diffraction is discussed for providing a single reflection grating lens that yields the same wave-front conversions for wavelengths of 420, 280, and 210 nm, which are used to sense NO_x and SO₂ gas densities. A blazed grating lens was fabricated by a planar process and characterized by use of UV lamps. The same wave-front conversion was observed at the three UV wavelengths. Efficiencies were measured to be 80%, 70%, and 30% for second-, third-, and fourth-order diffractions, respectively, at wavelengths of 420, 280, and 210 nm, respectively.

© 1999 Optical Society of America

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