Abstract

Refractive prismatic and off-axis micro-optical elements have been fabricated in gallium phosphide by mass-transport smoothing of multistep and binary preforms, respectively. A total optical efficiency of greater than 94% was measured for the prism, while diffraction-limited collimation and steering were demonstrated with the off-axis lens. A qualitative discussion of possible errors in binary preform etching and their effects on the surface figure is also included.

© 1999 Optical Society of America

Off-axis refractive mass-transported gallium-phosphide microlens array for the reduction of distortion in an optical interconnect system

Todd A. Ballen and James R. Leger
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Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses

Todd A. Ballen, James R. Leger, Daniel E. Glumac, Lori S. Swanson, and Edward Gage
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Tolerances in microlens fabrication by multilevel etching and mass-transport smoothing

Z. L. Liau, D. W. Nam, and R. G. Waarts
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Holographic diffractive collimators based on recording with homocentric diverging beams for diode lasers

Miroslav Miler, Ivo Koudela, and Ivo Aubrecht
Appl. Opt. 38(14) 3019-3024 (1999)