Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optical scatterometry of subwavelength diffraction gratings: neural-network approach

Not Accessible

Your library or personal account may give you access

Abstract

Optical scatterometry is a method for the on-line measurement of the geometry of a diffraction grating, which is deduced from diffraction-pattern data. We demonstrate the use of a neural network as a promising method for performing an accurate quantitative characterization of the geometry. As an example, we show the deduction of the geometry of a grating with subwavelength grooves with a rms accuracy of 1.9° for the slope of the groove walls, 0.7 nm for the linewidth, and 1.0 nm for the groove depth.

© 1998 Optical Society of America

Full Article  |  PDF Article
More Like This
Characterization of diffraction gratings in a rigorous domain with optical scatterometry: hierarchical neural-network model

Ilkka Kallioniemi, Jyrki Saarinen, and Erkki Oja
Appl. Opt. 38(28) 5920-5930 (1999)

Recognition of diffraction-grating profile using a neural network classifier in optical scatterometry

Issam Gereige, Stéphane Robert, Sylvie Thiria, Fouad Badran, Gérard Granet, and Jean Jacques Rousseau
J. Opt. Soc. Am. A 25(7) 1661-1667 (2008)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (13)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved