Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region

Claude Montcalm; Patrick A. Kearney; J. M. Slaughter; Brian T. Sullivan; M. Chaker; Henri Pépin; Charles M. Falco

doi:10.1364/AO.35.005134

Applied Optics
Vol. 35,
Issue 25,
pp. 5134-5147
(1996)
•https://doi.org/10.1364/AO.35.005134

Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region

Claude Montcalm, Patrick A. Kearney, J. M. Slaughter, Brian T. Sullivan, M. Chaker, Henri Pépin, and Charles M. Falco

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
Claude Montcalm, Patrick A. Kearney, J. M. Slaughter, Brian T. Sullivan, M. Chaker, Henri Pépin, and Charles M. Falco, "Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region," Appl. Opt. 35, 5134-5147 (1996)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

We have performed an experimental investigation of Ti-, B₄C-, B-, and Y-based multilayer mirrors for the soft x-ray–extreme ultraviolet (XUV) wavelength region between 2.0 and 12.0 nm. Eleven different material pairs were studied: Ti/Ni, Ti/Co, Ti/Cu, Ti/W, B₄C/Pd, B/Mo, Y/Pd, Y/Ag, Y/Mo, Y/Nb, and Y/C. The multilayers were sputter deposited and were characterized with a number of techniques, including low-angle x-ray diffraction and normal incidence XUV reflectometry. Among the Ti-based multilayers the best results were obtained with Ti/W, with peak reflectances up to 5.2% at 2.79 nm at 61° from normal incidence. The B₄C/Pd and B/Mo multilayer mirrors had near-normal incidence (5°) peak reflectances of 11.5% at 8.46 nm and 9.4% at 6.67 nm, respectively, whereas a Y/Mo multilayer mirror had a maximum peak reflectance of 25.6% at 11.30 nm at the same angle. The factors limiting the peak reflectance of these different multilayer mirrors are discussed.

Full Article | PDF Article

More Like This

Pd/B₄C/Y multilayer coatings for extreme ultraviolet applications near 10 nm wavelength

David L. Windt and Eric M. Gullikson
Appl. Opt. 54(18) 5850-5860 (2015)

Molybdenum–strontium multilayer mirrors for the 8–12-nm extreme-ultraviolet wavelength region

Benjawan Sae-Lao and Claude Montcalm
Opt. Lett. 26(7) 468-470 (2001)

Reflectance of a wideband multilayer x-ray mirror at normal and grazing incidences

J. F. Seely, M. P. Kowalski, W. R. Hunter, and G. Gutman
Appl. Opt. 35(22) 4408-4412 (1996)

Previous Article Next Article

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (12)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (5)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Wavelength Region (nm)	Spacers	R _max (%)
2.8–3.6	Sc, Ti, Ba, Be, Mg	~30–40
3.6–6.7	Ca, C, Ba	~45–55
6.7–11.5	B, B₄C, Ca	~55–65
8.0–12.0	Sr, B, Y, Be	~60–80

Material	Purity (%)	Target		Deposition Rate (nm/s)
Material	Purity (%)	Voltage (V)	Current (A)	Deposition Rate (nm/s)
Ag	99.999	−100	0.40	0.21
B₄C	99.9	−300	1.00	0.04
Co	99.91	−150	0.50	0.08
Cu	99.999	−150	0.50	0.24
Mo	99.95	−175	1.00	0.29
Nb	99.91	−175	0.60	0.10
Ni	99.991	−150	0.50	0.09
Pda	99.99	−100	0.75	0.22
Pd	99.99	−175	0.40	0.36
Ti	99.91	−150	0.50	0.05
W	99.95	−150	0.50	0.07
Yb	99.9	−175	1.00	0.43
Y	99.9	−175	0.40	0.21

Material Pair (A/B)	N	Λ (±0.01) (nm)	Γ (±0.02)	σ (±0.1) (nm)	α(deg)	λ_peak (nm)	Peak Reflectance (%)
Material Pair (A/B)	N	Λ (±0.01) (nm)	Γ (±0.02)	σ (±0.1) (nm)	α(deg)	λ_peak (nm)	R _m	R _t	β = R _m /R _t
Ti/Co	10	9.25	0.47	1.1/1.6	—	—	—	—	—
Ti/Ni	100	2.92	0.40	1.5/1.8	62	2.79	0.2 ± 0.1	39.1 ± 0.1	≤0.01
Ti/Cu	30	17.42	0.84	2.0/3.0	—	—	—	—	—
Ti/W	60	2.82	0.29	0.4/0.7	61	2.79	5.2 ± 0.1	24.3 ± 0.1	0.21 ± 0.01
B₄C/Pd	50	4.36	0.40	0.4/0.6	5	8.46	11.5 ± 0.2	38.4 ± 1.6	0.30 ± 0.02
B/Mo	100	3.35		0.4/0.7	5	6.67	9.4 ± 0.2	—	—
Y/Pd	60	4.95		1.0/1.5	5	9.69	0.3 ± 0.1	63.2 ± 1.0a	≤0.01
Y/Ag	70	5.33	0.43	1.0/1.8	5	10.80	0.1 ± 0.1	57.8 ± 1.0	≤0.01
Y/Mo	50	5.75	0.47	0.3/0.6	5	11.29	25.6 ± 0.2	51.9 ± 0.4	0.49 ± 0.01
Y/Nb	50	5.54	0.46	0.3/0.6	5	10.94	9.4 ± 0.1	37.5 ± 0.4	0.25 ± 0.01
Y/C	30	4.10		>1.0	—	—	—	—	—

	Ti-Based Pairs				B-Based Pairs		Y-Based Pairs
Parameter	Ti/Co	Ti/Ni	Ti/Cu	Ti/W	B₄C/Pd	B/Mo	Y/Pd	Y/Ag	Y/Mo	Y/Nb	Y/C
Multilayer quality	Poor	Poor	Poor	Good	Good	Good	Poor	Poor	Good	Good	Poor
$Δ H_{calc}^{\circ} (A B) (kJ / mol)$	−42	−52	−13	−9	—	−49	−123	−44	+35	+44	−72
Compound (A _x B _y )	TiCo	TiNi₃	TiCu₄	None	B₂Pd₅	BMo	YPd₃	YAg	None	None	Y₂C₃
$Δ H_{exp}^{\circ} (A_{x} B_{y}) (kJ / mol)$	−44	−35	−23	—	+45	−62	−94	−26	—	—	−51
$Δ H_{calc}^{\circ} (A_{x} B_{y}) (kJ / mol)$	−42	−37	−7	—	—	−49	−90	−44	—	—	−78

Compound	Ti	Co	Ni	Cu	W	B	Y	Pd	Ag	Mo	Nb	C
Oxide (A _x O _y )	Ti₂O₃	Co₃O₄	NiO	Cu₂O	WO₃	B₂O₃	Y₂O₃	PdO	Ag₂O	MoO₃	Nb₂O₅	—
$Δ G_{exp}^{\circ} (A_{x} O_{y}) (kJ / mol)$	−1434	−787	−213	−145	−764	−1193	−1817	−82	−11	−668	−1766	—
Nitride (A _x N _y )	TiN	Co₃N	Ni₃N	CuN₃	—	BN	YN	—	AgN₃	Mo₂N	Nb₂N	CN
$Δ G_{exp}^{\circ} (A_{x} N_{y}) (kJ / mol)$	−308	+34	+7	+67	—	−226	−269	—	+376	−50	−218	+427
Carbide (A _x C _y )	TiC	Co₂C	Ni₃C	—	WC	B₄C	YC₂	—	—	Mo₂C	Nb₂C	—
$Δ G_{exp}^{\circ} (A_{x} C_{y}) (kJ / mol)$	−180	+14	+32	—	−39	−72	−109	—	—	−47	−182	—

Abstract

Cited By

Figures (12)

Tables (5)

Applied Optics