Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Determination of the optical constants and thickness of thin films on slightly absorbing substrates

Not Accessible

Your library or personal account may give you access

Abstract

A method for solving the optical constants of a thin film on a slightly absorbing substrate is proposed. Using only a single-reflectance measurement together with the interference fringes, one can calculate with good accuracy the thickness and the real and imaginary parts of the refractive index of the film. Besides its simplicity, this method also avoids the problem of multiple solutions. We show that this technique is effective in solving for the optical constants of thin films with weak or moderate absorption characteristics, and in particular we applied it to obtain the optical properties of amorphous C thin films on Si.

© 1995 Optical Society of America

Full Article  |  PDF Article
More Like This
Optical constants of absorbing thin solid films on a substrate

L. Vriens and W. Rippens
Appl. Opt. 22(24) 4105-4110 (1983)

Determination of thickness and optical constants of thin films from photometric and ellipsometric measurements

Eduardo Elizalde, Jean Marc Frigerio, and Josette Rivory
Appl. Opt. 25(24) 4557-4561 (1986)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (31)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved