Abstract

The efficiency of an ion-etched blazed holographic grating was measured by the use of synchrotron radiation in the 125–133-Å wavelength range and at near-normal incidence. The grating had a Mo–Si multilayer interference coating that resulted in a peak normal-incidence efficiency of 13% in the second grating order and at a wavelength of 128 Å. This is the highest efficiency obtained to date from a multilayer-coated grating in this wavelength region and at normal incidence. These measurements are compared with similar measurements performed on the same grating 4.5 years later. Over this time the peak grating efficiency decreased from 13% to 8%, and this result is attributed to the decrease in the reflectance of the multilayer coating from 55% to 42%. Oxidation and contamination of the multilayer with carbon appear to be the causes of these losses. The groove efficiency of the grating substrate in the second order is 23%.

© 1995 Optical Society of America

Polarization and efficiency of a concave multilayer grating in the 135–250-Å region and in normal-incidence and Seya–Namioka mounts

J. F. Seely, R. G. Cruddace, M. P. Kowalski, W. R. Hunter, T. W. Barbee, J. C. Rife, R. Eby, and K. G. Stolt
Appl. Opt. 34(31) 7347-7354 (1995)

Normal-incidence efficiencies in the 115–340-Å wavelength region of replicas of the Skylab 3600-line/mm grating with multilayer and gold coatings

J. F. Seely, M. P. Kowalski, W. R. Hunter, T. W. Barbee, R. G. Cruddace, and J. C. Rife
Appl. Opt. 34(28) 6453-6458 (1995)

Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating

M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, R. Lenke, H. Kierey, T. W. Barbee, and W. R. Hunter
Opt. Lett. 29(24) 2914-2916 (2004)

On-blaze operation of a Mo/Si multilayer-coated, concave diffraction grating in the 136–142-Å wavelength region and near normal incidence

J. F. Seely, M. P. Kowalski, W. R. Hunter, J. C. Rife, T. W. Barbee, G. E. Holland, C. N. Boyer, and C. M. Brown
Appl. Opt. 32(25) 4890-4897 (1993)

Normal-incidence efficiencies of 4800-grooves/mm-ruled replica gratings with multilayer and gold coatings in the 125–325-Å wavelength region

John F. Seely, Tetsuya Watanabe, Tatsuo Harada, Jack C. Rife, and William R. Hunter
Appl. Opt. 38(10) 1920-1925 (1999)