Far-ultraviolet reflectance measurements and optical constants of unoxidized aluminum films

J. I. Larruquert; J. A. Méndez; J. A. Aznárez

doi:10.1364/AO.34.004892

Applied Optics
Vol. 34,
Issue 22,
pp. 4892-4899
(1995)
•https://doi.org/10.1364/AO.34.004892

Far-ultraviolet reflectance measurements and optical constants of unoxidized aluminum films

J. I. Larruquert, J. A. Méndez, and J. A. Aznárez

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J. I. Larruquert, J. A. Méndez, and J. A. Aznárez, "Far-ultraviolet reflectance measurements and optical constants of unoxidized aluminum films," Appl. Opt. 34, 4892-4899 (1995)

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Abstract

The far-UV reflectance of thin unoxidized aluminum films prepared and maintained in ultra-high-vacuum conditions was measured versus the angle of incidence, and the complex refractive index was obtained from those measurements on several wavelengths from 82.6 to 113.5 nm. Measurements were made on two perpendicular planes of incidence to deal with the unknown of the polarization state of the radiation beam. The surface roughness was characterized by atomic force microscopy. The refractive index is obtained for the first time, to our knowledge, from direct optical measurements in this spectral range. Current results match well the former values in the literature that were calculated through the Kramers–Kronig analysis by using in the above interval reflectances estimated from electron-energy-loss spectra and from optical measurements on surfaces of unstated roughness.

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Angle (deg)	Reflectance

	Horizontal Plane of Incidence				Vertical Plane of Incidence

	A	B	C	D	A	B	C	D
6	0.648	0.655	0.666	0.612
10	0.669	0.659	0.662	0.654	0.584	0.595	0.604	0.570
20	0.766	0.764	0.752	0.730	0.700	0.700	0.686	0.666
30	0.831	0.841	0.824	0.817	0.787	0.787	0.779	0.760
45	0.901	0.889	0.890	0.893	0.869	0.860	0.860	0.819
78	0.980	0.959	0.971	0.956	0.975	0.975	0.991	0.967

Angle (deg)	Reflectance

	Horizontal Plane of Incidence				Vertical Plane of Incidence

	A	B	C	D	A	B	C	D
6	0.695	0.680	0.701	0.653
10	0.690	0.691	0.703	0.683	0.654	0.656	0.654	0.611
20	0.769	0.773	0.770	0.741	0.718	0.699	0.711	0.701
30	0.841	0.825	0.824	0.824	0.795	0.774	0.778	0.760
45	0.900	0.910	0.878	0.871	0.859	0.846	0.842	0.820
78	0.980	0.986	0.962	0.964	0.974	0.975	0.985	0.956

Angle (deg)	Reflectance

	Horizontal Plane of Incidence				Vertical Plane of Incidence

	A	B	C	D	A	B	C	D
6	0.776	0.758	0.793	0.770
10	0.768	0.751	0.790	0.779	0.766	0.762	0.776	0.748
20	0.801	0.815	0.819	0.788	0.783	0.778	0.793	0.767
30	0.837	0.866	0.848	0.834	0.813	0.817	0.812	0.791
45	0.892	0.896	0.889	0.890	0.864	0.871	0.854	0.839
78	0.972	0.963	0.968	0.975	0.975	0.986	0.981	0.959

Angle (deg)	Reflectance

	Horizontal Plane of Incidence				Vertical Plane of Incidence

	A	B	C	D	A	B	C	D
6	0.820	0.808	0.844	0.821
10	0.830	0.809	0.840	0.812	0.810	0.820	0.817	0.794
20	0.852	0.833	0.855	0.837	0.812	0.826	0.814	0.789
30	0.866	0.862	0.872	0.854	0.832	0.820	0.825	0.788
45	0.900	0.891	0.911	0.885	0.872	0.852	0.875	0.839
78	0.977	0.982	0.985	0.980	0.966	0.953	0.959	0.956

Angle (deg)	Reflectance

	Horizontal Plane of Incidence				Vertical Plane of Incidence

	A	B	C	D	A	B	C	D
6	0.849	0.848	0.849	0.844
10	0.861	0.859	0.860	0.850	0.829	0.812	0.818	0.847
20	0.879	0.842	0.860	0.865	0.827	0.817	0.822	0.838
30	0.872	0.862	0.863	0.886	0.841	0.806	0.825	0.844
45	0.911	0.894	0.902	0.923	0.897	0.834	0.861	0.867
78	0.975	0.973	0.971	0.981	0.956	0.955	0.955	0.960

Angle (deg)	Reflectance

	Horizontal Plane of Incidence				Vertical Plane of Incidence

	A	B	C	D	A	B	C	D
6	0.881	0.872	0.881	0.882
10	0.896	0.868	0.890	0.882	0.873	0.847	0.873	0.856
20	0.896	0.883	0.900	0.883	0.861	0.848	0.862	0.862
30	0.901	0.870	0.912	0.894	0.870	0.842	0.864	0.860
45	0.918	0.902	0.922	0.905	0.885	0.855	0.873	0.862
78	0.981	0.976	0.981	0.977	0.947	0.944	0.948	0.946

λ (nm)	Refractive Index (n)	Extinction Coefficient (−k)	Reflectance (%)
82.6	0.115 ± 0.004	0.138 ± 0.014	63.6 ± 1.1
83.5	0.092 ± 0.004	0.180 ± 0.017	69.9 ± 1.2
86.8	0.053 ± 0.003	0.39 ± 0.05	83.4 ± 1.0
92.0	0.044 ± 0.006	0.56 ± 0.06	87.6 ± 1.0
96.4	0.038 ± 0.003	0.68 ± 0.08	90.2 ± 0.8
104.8	0.031 ± 0.001	0.88 ± 0.08	93.2 ± 0.7
113.5	0.026 ± 0.003	0.97 ± 0.04	94.7 ± 0.8

Abstract

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Tables (8)

Equations (20)

Applied Optics