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Fizeau phase-measuring interferometry using the moiré effect

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Abstract

The automation of the fringe pattern analysis in Fizeau interferometry combining the moiré effect with the phase-stepping evaluation method is presented. In this case the phase modulator is a Ronchi grid placed at the interferometer image plane yielding a moiré image, and the necessary phase steps are obtained, simply translating the grid in its own plane, perpendicular to the optical axis. A detailed description of the moiré image formation as an incoherent superposition is developed. Measurements were carried out in a Fizeau interferometer built by the authors, and rms repeatabilities of less than 3 deg in the phase-difference values were attained.

© 1995 Optical Society of America

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