Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Reflection–transmission photoellipsometry: theory and experiments

Not Accessible

Your library or personal account may give you access

Abstract

We propose a method that uses reflection and transmission photoellipsometry to analyze samples consisting of thin films combined with semitransparent thick layers or substrates in the form of multilayer structures. A thick film or substrate is defined as a layer for which no interference effects can be observed for a given wavelength resolution, and contributions from multiple reflections in the substrate are taken into account in the theoretical treatment. An automatic reflection–transmission spectroscopic ellipsometer was built to test the theory, and satisfactory results have been obtained. Examples corresponding to a strongly absorbing film deposited on a glass substrate and a highly transmitting film also deposited on glass are shown. In both cases a good fit between theory and experiment is found. The photoellipsometric method presented is particularly suited to the analysis of actual samples of energy-efficient coatings for windows.

© 1995 Optical Society of America

Full Article  |  PDF Article
More Like This
Transmission and reflection ellipsometry of thin films and multilayer systems

G. Bader, P. V. Ashrit, and Vo-Van Truong
Appl. Opt. 37(7) 1146-1151 (1998)

Combined reflection and transmission thin-film ellipsometry: a unified linear analysis

R. M. A. Azzam, M. Elshazly-Zaghloul, and N. M. Bashara
Appl. Opt. 14(7) 1652-1663 (1975)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (32)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved