Abstract

A further-developed three-plate rotation method [Appl. Opt. 31, 3767 (1992)] for the absolute testing of flats is used as a measuring method for establishing flatness standards. A special phase-stepping Fizeau interferometer was built that permits flats of diameters up to 200 mm to be tested. First results show a mean error between 0.002 and 0.003 λ in the determination of the absolute flatness deviations (λ = 632.8 nm). These deviations are obtained at 500–600 points on each plate. A number of experimental conditions connected with the thermal and mechanical stability of the plates must be fulfilled.

© 1994 Optical Society of America

Establishing an Optical Flatness Standard

G. Schulz, J. Schwider, C. Hiller, and B. Kicker
Appl. Opt. 10(4) 929-934 (1971)

Absolute flatness testing by the rotation method with optimal measuring-error compensation

Günter Schulz and Jürgen Grzanna
Appl. Opt. 31(19) 3767-3780 (1992)

Absolute testing of optical flats at points on a square grid: error propagation

Jürgen Grzanna
Appl. Opt. 33(28) 6654-6661 (1994)

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Chen Xu, Lei Chen, and Jiayi Yin
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Absolute flatness testing by an extended rotation method using two angles of rotation

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