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Thermally induced birefringence and stress in poly(methyl methacrylate) waveguides on oxidized silicon substrates

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Abstract

A thermally induced birefringence in a poly(methyl methacrylate) waveguide has been observed. From polarization measurements made at the output of a waveguide in the range 20–60°C, a value for Δ(nTEnTM)/ΔT of 1.1 × 10−6 °C−1 has been calculated. After waveguide preparation the underlying substrate was found to have a bow. By measuring changes in the bow caused by temperature in the range 20–60°, we have calculated a value for the change in stress in the polymethyl methacrylate film of 0.18 MPa/°C. By relating polarization to stress, changes in stress as small as 90 kPa can be measured.

© 1993 Optical Society of America

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