Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Ion assisted deposition of thermally evaporated Ag and Al films

Not Accessible

Your library or personal account may give you access

Abstract

Optical, electrical, and microstructural effects of Ar-ion bombardment and Ar incorporation on thermally evaporated Ag and Al thin films are investigated. The results show that as the momentum supplied to the growing films by the bombarding ions per arriving metal atom increases, the refractive index at 632.8 nm increases and the extinction coefficient decreases, lattice spacing expands, grain size decreases, electrical resistivity increases, and trapped Ar increases slightly. In Ag films, stress reverses from tensile to compressive and in Al films compressive stress increases. In the Al films the change in optical constants can be explained by the variation in void volume. The reversal of stress from tensile to compressive in Ag films requires a threshold level of momentum. The increase in electrical resistivity is related to the decrease in grain size and increase in trapped Ar in both types of film. Many of these properties correlate well with the momentum transferred, suggesting that the momentum is an important physical parameter in describing the influence of ion beam on growing thin films and determining the characteristics of thin metal films prepared by ion assisted deposition.

© 1989 Optical Society of America

Full Article  |  PDF Article
More Like This
Optical inhomogeneity and microstructure of ZrO2 thin films prepared by ion-assisted deposition

Hyun Ju Cho and Chang Kwon Hwangbo
Appl. Opt. 35(28) 5545-5552 (1996)

Influence of ion assistance on LaF3 films deposited by molybdenum boat evaporation

Ming-Chung Liu, Cheng-Chung Lee, Masaaki Kaneko, Kazuhide Nakahira, and Yuuichi Takano
Appl. Opt. 51(15) 2865-2869 (2012)

Effects of low substrate temperature and ion assisted deposition on composition, optical properties, and stress of ZnS thin films

Judith A. Ruffner, Marc D. Himel, Victor Mizrahi, George I. Stegeman, and Ursula J. Gibson
Appl. Opt. 28(24) 5209-5214 (1989)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (4)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved