Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Low loss Si3N4–SiO2 optical waveguides on Si

Not Accessible

Your library or personal account may give you access

Abstract

We have developed an optical integrated circuit waveguide technology based on conventional Si processing. We demonstrate waveguide losses of <0.3 dB/cm in the 1.3–1.6-μm wavelength range. We use a high refractive-index core of Si3N4 surrounded by SiO2 cladding layers, which provides a highly confined optical mode adequate for butt coupling to channel substrate buried heterostructure lasers. We report the first IR transmission experiments in these waveguides and find two absorption peaks associated with H in SiO2 and Si3N4 layers at 1.40 and 1.52 μm, respectively. The peak absorptions are 2.2 and 1.2 dB/cm, respectively, and these peaks can be largely removed by annealing at 1100–1200°C.

© 1987 Optical Society of America

Full Article  |  PDF Article
More Like This
Low loss Bragg reflectors on SiO2–Si3N4–SiO2 rib waveguides

H. J. Lee, C. H. Henry, R. F. Kazarinov, and K. J. Orlowsky
Appl. Opt. 26(13) 2618-2620 (1987)

Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction

Kevin K. Lee, Desmond R. Lim, Lionel C. Kimerling, Jangho Shin, and Franco Cerrina
Opt. Lett. 26(23) 1888-1890 (2001)

Low-loss, high-index-contrast Si3N4/SiO2 optical waveguides for optical delay lines in microwave photonics signal processing

Leimeng Zhuang, David Marpaung, Maurizio Burla, Willem Beeker, Arne Leinse, and Chris Roeloffzen
Opt. Express 19(23) 23162-23170 (2011)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved