Abstract
A theoretical analysis of the measurement accuracy in sinusoidal phase modulating (SPM) interferometry is presented. The measurement accuracy is dependent on multiplicative and additive noise. The characteristics of SPM interferometry in the presence of this noise are made clear. Theoretical results show clearly that SPM interferometry has a high measurement accuracy of the order of 1 nm.
© 1986 Optical Society of America
Full Article | PDF ArticleMore Like This
Osami Sasaki and Hirokazu Okazaki
Appl. Opt. 25(18) 3137-3140 (1986)
Osami Sasaki, Hirokazu Okazaki, and Makoto Sakai
Appl. Opt. 26(6) 1089-1093 (1987)
Arnaud Dubois
J. Opt. Soc. Am. A 18(8) 1972-1979 (2001)