Abstract

A theoretical analysis of the measurement accuracy in sinusoidal phase modulating (SPM) interferometry is presented. The measurement accuracy is dependent on multiplicative and additive noise. The characteristics of SPM interferometry in the presence of this noise are made clear. Theoretical results show clearly that SPM interferometry has a high measurement accuracy of the order of 1 nm.

© 1986 Optical Society of America

Sinusoidal phase modulating interferometry for surface profile measurement

Osami Sasaki and Hirokazu Okazaki
Appl. Opt. 25(18) 3137-3140 (1986)

Sinusoidal phase modulating interferometer using the integrating-bucket method

Osami Sasaki, Hirokazu Okazaki, and Makoto Sakai
Appl. Opt. 26(6) 1089-1093 (1987)

Phase-map measurements by interferometry with sinusoidal phase modulation and four integrating buckets

Arnaud Dubois
J. Opt. Soc. Am. A 18(8) 1972-1979 (2001)

Real time displacement measurement in sinusoidal phase modulating interferometry

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Appl. Opt. 28(24) 5270-5274 (1989)

Sinusoidal phase modulating interferometer using optical fibers for displacement measurement

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Appl. Opt. 27(19) 4139-4142 (1988)