Roughness measurements by spectroscopic ellipsometry

J. R. Blanco; P. J. McMarr; K. Vedam

doi:10.1364/AO.24.003773

Applied Optics
Vol. 24,
Issue 22,
pp. 3773-3779
(1985)
•https://doi.org/10.1364/AO.24.003773

Roughness measurements by spectroscopic ellipsometry

J. R. Blanco, P. J. McMarr, and K. Vedam

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J. R. Blanco, P. J. McMarr, and K. Vedam, "Roughness measurements by spectroscopic ellipsometry," Appl. Opt. 24, 3773-3779 (1985)

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Abstract

The surface roughnesses of fifteen well-characterized aluminum roughness standards were studied using spectroscopic ellipsometry in the spectral range from 300 to 650 nm at 70° angle of incidence. It was found that the measured ellipsometric parameters ψ and Δ qualitatively discriminated between the rms roughnesses of the specimens. The rms local surface slopes (tanβ) were also calculated from the measured ellipsometric parameters Δ and ψ using the theory of Ohlidal and Lukes. All the ellipsometric results were compared with those obtained from total integrated scattering measurements. Good qualitative agreement was found.

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Sample	First measurement		Second measurement
Sample	TIS	rms roughness (nm)	TIS	rms roughness (nm)
R-1B	6.57 × 10⁻⁵	0.42	1.20 × 10⁻³	1.74
R-2B	2.20 × 10⁻⁴	0.76	8.69 ×10⁻⁴	1.49
R-3B	5.23 × 10⁻⁴	1.18	1.37 ×10⁻³	1.86
R-4B	1.26 × 10⁻³	1.83	2.49 × 10⁻³	2.52
R-5B	2.29 × 10⁻³	2.46	7.60 × 10⁻³	4.39
R-6B	3.23 × 10⁻³	2.93	6.71 × 10⁻³	4.13
R-7B	6.94 × 10⁻³	4.29	1.43 × 10⁻²	6.02
R-8B	1.22 × 10⁻²	5.67	2.37 × 10⁻²	7.76

Sample	δΔ = (Δ_o − Δ) (deg)	δψ = (ψ_o − ψ) (deg)
R-1B	0.23 ± 0.04	0.06 ± 0.01
R-3B	−0.18 ± 0.03	0.06 ± 0.01
R-4B	0.54 ± 0.09	0.07 ± 0.01
R-5B	0.37 ± 0.07	0.12 ± 0.02
R-6B	0.40 ± 0.07	0.11 ± 0.02
R-7B	0.65 ± 0.11	0.20 ± 0.04
R-8B	1.03 ± 0.17	0.29 ± 0.05

Sample	rms Surface slope
R-1B	0.025 ± 0.003
R-3B	0.011 ± 0.002
R-4B	0.037 ± 0.002
R-5B	0.034 ± 0.003
R-6B	0.034 ± 0.002
R-7B	0.043 ± 0.003
R-7B	0.055 ± 0.001

TIS		Spectroscopic ellipsometry
First measurement	Second measurement	ψ Difference	Δ Difference	tanβ_o
R-1B	R-2B	R-2B	R-2B	R-2B
R-2B	R-1B	R-1B	R-3B	R-3B
R-3B	R-3B	R-3B	R-1B	R-1B
R-4B	R-4B	R-4B	R-5B	R-5B
R-5B	R-6B	R-6B	R-6B	R-6B
R-6B	R-5B	R-5B	R-4B	R-4B
R-7B	R-7B	R-7B	R-7B	R-7B
R-8B	R-8B	R-8B	R-8B	R-8B

Sample	First measurement		Second measurement
Sample	TIS	rms roughness (nm)	TIS	rms roughness (nm)
R-1B	6.57 × 10⁻⁵	0.42	1.20 × 10⁻³	1.74
R-2B	2.20 × 10⁻⁴	0.76	8.69 ×10⁻⁴	1.49
R-3B	5.23 × 10⁻⁴	1.18	1.37 ×10⁻³	1.86
R-4B	1.26 × 10⁻³	1.83	2.49 × 10⁻³	2.52
R-5B	2.29 × 10⁻³	2.46	7.60 × 10⁻³	4.39
R-6B	3.23 × 10⁻³	2.93	6.71 × 10⁻³	4.13
R-7B	6.94 × 10⁻³	4.29	1.43 × 10⁻²	6.02
R-8B	1.22 × 10⁻²	5.67	2.37 × 10⁻²	7.76

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Applied Optics