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Repetitively pulsed-plasma soft x-ray source

David J. Nagel, Charles M. Brown, M. C. Peckerar, Marshall L. Ginter, J. A. Robinson, Thomas J. McIlrath, and P. K. Carroll

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Abstract

A 10-Hz Nd:YAG laser system with 0.6-J, 25-nsec pulses was used to produce plasmas which emitted strongly in the soft x-ray region. Spectral, temporal, and spatial characteristics of these plasma emissions are presented together with an application of the source to soft x-ray lithography.

© 1984 Optical Society of America

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