1.06-μm laser damage of thin film optical coatings: a round-robin experiment involving various pulse lengths and beam diameters

K. H. Guenther; T. W. Humpherys; J. Balmer; J. R. Bettis; E. Casparis; J. Ebert; M. Eichner; A. H. Guenther; E. Kiesel; R. Kuehnel; D. Milam; W. Ryseck; S. C. Seitel; A. F. Stewart; H. Weber; H. P. Weber; G. R. Wirtenson; R. M. Wood

doi:10.1364/AO.23.003743

Applied Optics
Vol. 23,
Issue 21,
pp. 3743-3752
(1984)
•https://doi.org/10.1364/AO.23.003743

1.06-μm laser damage of thin film optical coatings: a round-robin experiment involving various pulse lengths and beam diameters

K. H. Guenther, T. W. Humpherys, J. Balmer, J. R. Bettis, E. Casparis, J. Ebert, M. Eichner, A. H. Guenther, E. Kiesel, R. Kuehnel, D. Milam, W. Ryseck, S. C. Seitel, A. F. Stewart, H. Weber, H. P. Weber, G. R. Wirtenson, and R. M. Wood

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K. H. Guenther, T. W. Humpherys, J. Balmer, J. R. Bettis, E. Casparis, J. Ebert, M. Eichner, A. H. Guenther, E. Kiesel, R. Kuehnel, D. Milam, W. Ryseck, S. C. Seitel, A. F. Stewart, H. Weber, H. P. Weber, G. R. Wirtenson, and R. M. Wood, "1.06-μm laser damage of thin film optical coatings: a round-robin experiment involving various pulse lengths and beam diameters," Appl. Opt. 23, 3743-3752 (1984)

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Abstract

A number of commercially available optical coatings, both antireflective and high reflective, have been tested for their laser-induced damage threshold, involving a total of eight different laboratories. The results obtained and the experimental methods used at these laboratories were discussed among the participants in this round robin at a minisymposium held at Balzers, Liechtenstein, 9–10 Dec. 1982. A final report of the round robin and a summary of the conclusions drawn at that symposium are presented.

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Laboratory	K’lautern	Hannover	LLNL	AFWL	Berne	Siemens	GEC	NWC

Sample set No.	..0,..1	..2,..3	..4	..5	..6	..7	..8	..9
Cleaning	blow dry air	blow dry N₂	Ethanol wipe	Ethanol wipe	blow dry N₂	blow dry N₂	blow dry N₂	blow dry N₂
Sample location	in F	in F	near F	in F	50 before F	in F	in F	in F
Focal length [mm]	150	50	4000 – 6000	1200	1000	50	100 and 300	165
Mode of operation TEM_m,n	0.0	∞,∞	0.0	0.0	0.0	multi	0.0	0.0
Polarization	circ.	lin.	lin.	lin.	lin.	lin.	lin.	lin.
Spot size d[μm], FW at 1/e² intensity	470	210	4000	360	1100	340	150	40
Pulse length τ [ns], FWHM	10	12	1	5.9	35 · 10⁻³	20	15 and 25	13
Number of pulses per sample	20	20–40	⩾4	100	10	⩾ 10.000	500	30
Number of pulses per site	1	1	1	1	1	⩾ 10.000	1	1
Site selection	presel.	presel.	random	random circ.	presel.	random	random + presel.	random
Local separation [mm]	1 – 3	~2	5	~1	3	3 – 4	0.2	1
Assessement of damage	He-Ne-scattering	He-Ne-scattering, Nomarski micr.	visual micr. induced light	Nomarski micr.	He-Ne-scattering visual obser.	visual micr.	visual micr.	He-Ne-scattering

References	10	11,12	13,14	2,9	15	16	17	18

Sample No.	Type of Coating (Balzers Prod. Name)	Designx) and Layer Materialsxx)	Number of Layers	Spectral Specification
04.	V-type AR coating	A/k₁L₁/k₂H/2L₂/S
05.	(Laser-Transmax)	L₁ = MgF₂	3	R ⩽ 0.1%
06		L₂ = SiO₂		at 1.06 μm
		H = Roma
10.	Laser-Mirror	A/2L/(HL)12/H/S		R ⩾ 99.7%
11.	(“RS”)	L = SiO₂	26	at 1.06 μm
12.		H = Ta₂O₅
16.	Laser-Mirror	A/2L/(HL)11/H/S		R ⩾ 99.7%
17.	(“TS”)	L = SiO₂	24	at 1.06 μm
18.		H = TiO₂
22.	Broad-Band AR-Coating	A/LMH/xxx)S		R ⩽ 1.0%
23.	VIS +AR (1.06 μm)	L = MgF₂	5	475–625 nm
24.	(Duolin)	M = Al₂O₃		and 1060nm
		H = Roma

Coatings facility	RS		TS		LT		DN
Coatings facility	F _min(D)	F _max(ND)	F _min(D)	F _max(ND)	F _min(D)	F _max(ND)	F _min(D)	F _max(ND)
Berne	0.40	0.30	0.40	0.40	1.20	0.61	0.20	0.30
	0.40	0.30	0.40	0.30	0.41	0.19	0.30	0.30
	0.40	0.30	0.30	0.40	0.53	0.23	0.30	0.20
Avg	0.40	0.30	0.37	0.37	0.71	0.34	0.27	0.27
LLNL	9.5	7.0	11.2	11.2	5.7	3.4	5.1	3.4
	11.2	9.5	11.2	9.5	5.7	4.7	5.1	3.4
	13.1	10.7	10.4	8.2	1.8	1.4	3.5	2.3
Avg	11.3	9.1	10.9	9.6	4.4	3.2	4.6	3.0
AFWL	28.5	53.6	12.0	37.0	1.5	4.3	3.4	5.8
Avg	28.5	53.6	12.0	37.0	1.5	4.3	3.4	5.8
K’lautern	71.5	82.0	81.4	90.8	15.4	19.8	19.8	23.7
	82.5	93.0	63.3	79.2	21.5	33.5	19.8	22.0
	88.0	96.3	69.9	89.6	24.2	34.7	14.3	18.2
Avg	80.7	90.4	71.5	86.5	20.4	29.3	18.0	21.3
Hanover	53.5	65.3	36.4	42.4	8.2	10.0	4.4	7.3
	53.2	67.8	38.4	42.7	6.2	9.5	3.8	6.4
	58.0	62.0	29.4	33.6	9.5	10.6	5.8	9.4
Avg	54.9	65.0	34.7	39.6	8.6	10.0	4.7	7.7
NWC	91.7	255.1	117.2	146.0	56.7	131.9	44.5	125.0
	153.3	253.1	112.2	161.3	23.5	52.4	50.6	153.6
	178.8	257.8	116.4	89.9	15.2	163.7	82.3	151.6
Avg	141.3	255.3	115.3	132.4	31.8	116.0	59.1	143.4
GECa	14.4	86.2	10.7	86.3	17.7	90.0	9.8	53.8
	15.1	86.2	11.7	86.3	13.8	90.0	14.3	86.2
	11.1	86.2	11.1	86.3	13.8	90.0	11.4	53.8
Avg	13.5	86.2	11.1	86.3	15.1	90.0	11.8	64.6
Siemens	2.6	8.0	16.4	28.5	0.8	3.0	10.6	18.0
	2.6	7.8	26.6	37.5	1.0	2.6	21.6	37.5
	2.8	5.2	21.1	37.5	10.0	11.0	13.0	37.5
Avg	2.7	7.0	21.4	34.5	3.9	5.5	15.1	31.0

Facility	FWHM pulse length τ (nsec)	1/e² beam diameter d (μm)	Form of damage
Berne	35 × 10⁻³	1100	High density pits
LLNL	1	4000	Random pits
AFWL	5.9	360	Random pits
K’lautern	10	470	Flakes
Hanover	12	210	Flakes
NWC	13	40	Flakes, pits
GEC	15 or 25	150	Flakes
Siemens	20	340	Flakes

Pulse length τ (nsec) coatings		0.35	1.0	5.9	10.0	12.0	13.0	15.0	20.0	Avg
HR	RS	1.46	3.36	3.43	5.05	3.98	6.26	1.87	0.78	3.2
HR	TS	1.41	3.30	2.22	4.76	3.16	5.65	1.70	2.19	3.0
AR	LT	1.95	2.10	0.79	2.54	1.58	2.97	1.97	0.93	1.8
AR	DN	1.20	2.14	1.18	2.39	1.16	4.05	1.75	1.84	1.9

Category	Parameter	Recommended consideration
Sample handling and pre-conditioning	Storage	Store in clean, dust protecting containers, maintaining controlled relative humidity
	Cleaning	Dry (oil-free) air or nitrogen blow to remove residing particles, ethanol, methanol, or isopropanol wipe (specify) to remove fingerprints and grease
	Conditioning	Use dessicator or dry air oven (100°C) for a minimum of 24 h prior to testing
Testing geometry	Sample location	In focus of a convergent beam, focal length of focusing lens L ≥ 100 mm (if deviating, specify)
	Angle of incidence	At coating design angle (specify if deviating)
	Separation of testing sites on sample surface	Distance D between site centers: D ≥ 5 × d (d = 1/e² beam diameter on the sample)
	Array of testing sites on sample surface	Regular (either a matrix, concentric circles, or a spiral) to enable identification
Laser pulse	Mode of operation	TEM₀₀
	Polarization	Linear, for oblique incidence, both s and p
	Spatial intensity distribution	Gaussian, or describe precisely when deviating
	Spot diameter d at coating surface (or equivalent distance)	Full width (FW) at I₀/e², specify precisely when deviating
	Pulse shape (time)	Gaussian, or describe precisely when deviating
	Pulse length (duration)	Full width at half-maximum intensity (FWHM)
	Number N of shots	Per site: preferably 1-on-1, if N-on-1, specify N and repetition rate
	Number N of shots	Per sample: depends on spot size d. As a guide, d × N_sample ≥ 10,000 (d in μm)
	Spot size	d(1/e²) ≥ 300 μm
Determination of LIDT	Definition of damage	Set threshold for malfunction of the coating for intended use (specify)
	Detection of damage event	Specify use of: magnifier (power), optical microscope (magnification), or auxiliary He–Ne scattering (preferred)
	Quantification of LIDT	Utilize graphical presentation of damage probability distribution23 or survival curve.22 As a minimum, however, F_min(D) (J/cm²) and/or I_min(D) (GW/cm²) should be specified
Documentation	Test conditions	Document everything of the aforementioned items
	Sample identification	Mark appropriately in such a way that it is possible to relocate any site
	Damage sites	It is useful to take micrographs at least of the minimum damage sites (onset of damage)
	Variations	Note any deviations from the suggested procedures

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Applied Optics