Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Properties of Ion-Bombarded Fused Quartz for Integrated Optics

Not Accessible

Your library or personal account may give you access

Abstract

Development of techniques for production of carefully controlled, low-loss optical waveguides in solid dielectric materials is essential to development of integrated optical circuits for signal processing in future optical communications systems. Ion implantation offers an attractive possibility because of the refractive index and film thickness control possible by this technique. To evaluate this possibility we have investigated some of the optical properties of ion-bombarded fused quartz. A variety of ions ranging from helium ions to bismuth ions has been used. We have concentrated on refractive index and optical loss variations (on those implants into which a beam could be launched) as effected by (1) ion species and dose, (2) surface preparation, (3) surface temperature during bombardment, and (4) postbombardment annealing. This paper does not attempt to give an inclusive account of all the results obtained but principally discusses the best results so far, which are those using lithium ions. For lithium ion bombardment we have observed approximately linear variation of refractive index at 6328 Å with dose n = n0 + 2.1 × 10−21C, where n0 is the prebombardment value (= 1.458 for fused quartz), and C is the ion concentration in ions/cm3 (C < 2.2 × 1019). The optical absorption decreases significantly with increase in substrate temperature during implantation, and losses less than 0.2 dB/cm have been achieved. The refractive index change appears to be primarily due to disorder produced by the incident particles rather than a chemical doping effect as evidenced by postbombardment annealing studies.

© 1972 Optical Society of America

Full Article  |  PDF Article
More Like This
Low propagation loss of the waveguides in fused quartz by oxygen ion implantation

Xue-Lin Wang, Ke-Ming Wang, Gang Fu, Shi-Ling Li, Ding-Yu Shen, Hong-Ji Ma, and Rui Nie
Opt. Express 12(20) 4675-4680 (2004)

Silicon Oxynitride Films on Fused Silica for Optical Waveguides

M. J. Rand and R. D. Standley
Appl. Opt. 11(11) 2482-2488 (1972)

Effects of bombardment on optical properties during the deposition of silicon nitride by reactive ion-beam sputtering

M. F. Lambrinos, R. Valizadeh, and J. S. Colligon
Appl. Opt. 35(19) 3620-3626 (1996)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved